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SPA 25

SPA 25 – Surface Profile Analyzer

The SPA 25 utilises the white-light interferometry technique that features a height resolution of down to 0.1 nm even with small magnification factors. It can be used with either a manual or a motorised automatic sample table. Using a motorised sample table enables software controlled image stitching which combines multiple individual scans hence, larger areas of up to 300 mm x 300 mm can be visualized and analysed.

Main Feature

    • white-light interferometry measurement technique
    • precision piezoelectric scan drive with gauge control
    • up to 400 μm scan range (z-direction) and 11.3 μm/s scan speed at full resolution
    • USB 3 high speed camera with 1920 x 1200 pixel max. resolution and up to 3000 frames/s with restricted ROI
    • two scan modes:
      • VSI (vertical scanning interferometry) with 1 nm height resolution
      • EPSI (extended phase shift interferometry) with 0.1 nm height resolution
    • Mirau interferometer microscope objectives with different magnification factors
    • manual or automatic sample table
    • control unit with integrated powerful PC:
      • Intel® Core™ I5
      • 16 GB RAM
      • 500 GB SSD
      • NVIDIA® graphics card
      • Microsoft® Windows™ 10 Pro


The SPA 25 is controlled via the SPS 25 Surface Profile Software. It uses the industry leading MountainsMap® Imaging Topography evaluation software to analyse the surface profile. Learn more about the Software for the SPA 25.


The SPA 25 can be combined with different automatic or manual sample table as well as various Mirau microscope objectives. Learn more about the available accessories.

Download & Resources

SPA 25 Brochure

For more information or to arrange a call from one of the Crea Particle Science Team, please complete the contact form. If your enquiry is urgent, please call us on 1300 552 725.

SPA 25 Enquiry








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